This study was to design a bench-scale experiment and fabricate a pilot-scale treatment plant to treat the industrial wastewater with wasted solvent using advanced oxidation processes. The investigation works in the laboratory were focused on the oxidation of some major solvents including IPA, PGME, PGMEA, DMSO, and NMP. To better comprehend the oxidation efficacy of using advanced oxidation processes, such as ozone, ozone/UV, hydrogen peroxide/UV, ozone/hydrogen peroxide, and ozone/hydrogen peroxide/UV, on the individual solvent component, batch oxidation reactor was used to facilitate the experimental operation. According to the results, it is found that 6.5 grams of IPA with initial concentration of 3% at 25℃ could be decomposed by each gram of ozone dosage. In addition, the processes of ozone/UV and ozone/hydrogen/UV used in this research show a significant removal of IPA for 50 ~ 60 percent. It does not show any difference at various pH values using hydrogen peroxide/UV to oxidize PGME and PGMEA. Ozonation and ozone/UV at alkaline pHs show a better reduction on target organics by the attacks of hydroxyl radicals. Due to the unsaturated functional group bonded on the chemical structure of DMSO and NMP, it was found the direct attack by ozone molecules or indirect reaction by OH radicals would have the identical decomposition ability. However, TOC removal shows that it has a better reduction under alkaline condition.During pilot scale test, the chosen processes, such as UV/O3/FeOOH and H2O2/O3/UV/FeOOH, were demonstrated to have better removal for all three compounds. The COD removal rate would be 60 percent. For the treatment of wasted-solvent wastewater in Zi-yuei-kuang semiconductor manufacturer, it is suggest that using ozone dosage at 6000 g per day plus UV, hydrogen peroxide, and iron catalyst should eliminate 95 percent of COD and satisfactorily meet the effluent standard by incorporating the discharge of other wastewaters. The annual disbursement will be saved for more than 60 percent comparing with the current contract of incineration treatment.

Advanced Oxidation Processes、High-tech Industry